|
|
Volumn 518, Issue 4, 2009, Pages 1129-1135
|
|
A comparison of different spray chemical vapour deposition methods for the production of undoped ZnO thin films
|
|
Author keywords
Annealing; Infrared heating; Optical electrical structure properties; Spray CVD; Surface tension; Zinc oxide
|
|
Indexed keywords
CHEMICAL VAPOUR DEPOSITION;
CONVENTIONAL APPROACH;
CRYSTALLINITIES;
CVD REACTORS;
ELECTRICAL AND OPTICAL PROPERTIES;
ELECTRICAL STRUCTURES;
GASEOUS SPECIES;
GLASS SUBSTRATES;
SPRAY CVD;
TEMPERATURE RANGE;
ULTRASONIC SPRAY;
ZINC ACETATE;
ZNO THIN FILM;
ANGLE MEASUREMENT;
ANNEALING;
CONTACT ANGLE;
CRYSTALLITE SIZE;
DEPOSITION;
ELECTRIC PROPERTIES;
HEATING;
INFRARED HEATING;
INFRARED LAMPS;
LIGHTING;
METALLIC FILMS;
OPTICAL FILMS;
OPTICAL PROPERTIES;
SEMICONDUCTING ZINC COMPOUNDS;
SUBSTRATES;
SURFACE PROPERTIES;
SURFACE TENSION;
THIN FILMS;
ZINC;
ZINC OXIDE;
CHEMICAL VAPOR DEPOSITION;
|
|
EID: 71649108623
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2009.01.157 Document Type: Article |
|
Times cited : (31)
|
|
References (10)
|
