Resistance Electric Field Dependence and Time Drift of Piezoresistive Single Crystalline Silicon Nanofilms

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 80-83

  Anderås, Emil ^a   Vestling, Lars ^b   Olsson, Jörgen ^b   Katardjiev, Ilia ^b  

^a Radi Medical Systems AB   (Sweden)

^b UPPSALA UNIVERSITY   (Sweden)

Author keywords

nanofilm; piezoresistance; time drift

Indexed keywords

BULK SILICON; ELECTRIC FIELD DEPENDENCE; HOLE INJECTION; MOBILE CHARGE; NANO FILMS; PIEZO-RESISTIVE; PIEZORESISTANCE; PIEZORESISTIVE EFFECTS; PIEZORESISTIVE PROPERTIES; SINGLE CRYSTALLINE SILICON; STEADY STATE; SUBSTRATE BIAS; THICK SOI; TIME DRIFT;

CRYSTALLINE MATERIALS; ELECTRIC FIELDS;

TIME MEASUREMENT;

EID: 71549171107     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.020     Document Type: Conference Paper

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