Normally-closed peristaltic micropump with re-usable actuator and disposable fluidic chip

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 1515-1518

  Trenkle, F ^a   Haeberle, S ^b   Zengerle, R ^a,b  

^a UNIVERSITY OF FREIBURG   (Germany)

^b Institute for Micromachining and Information Technology   (Germany)

Author keywords

fluidic chip; modular micropump; Normally closed; piezostack micropump

Indexed keywords

BACK PRESSURES; ELECTRIC POWER; MICRO PUMP; PERISTALTIC MICROPUMPS; PIEZOSTACK; PIEZOSTACK MICROPUMP; PUMP RATE;

ACTUATORS; FORCE MEASUREMENT;

PUMPS;

EID: 71549161129     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.378     Document Type: Conference Paper

References (6)

1. Nguyen N.-T., Huang X., and Chuan T.K. MEMS-micropumps: a review. Journal of Fluids Engineering 124 (2002) 384-392
2. Laser D.J., and Santiago J.G. A review of micropumps. Jounal of Micromech. Microeng 14 (2004) 35-64
3. Woias P. Micropumps - past, progress and future prospects. Sensors and Actuators B 105 (2005) 28-38
4. Esashi M., Shoji S., and Nakano A. Normally-closed microvalve and micropump fabricated on a silicon wafer. Sensors and Actuators 20 (1989) 163-169
5. Cao L., Mantell S., and Polla D. Design and simulation of an implantable medical drug delivery system using microelectromechanical systems technology. Sensors and Actuators A 94 (2001) 117-125
6. Stehr M., Messner S., Sandmaier H., and Zengerle R. The VAMP - a new device for handling liquids or gases. Sensors and Actuators A 57 (1996) 153-157