New electronic device for driving surface acoustic wave actuators

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 1111-1114

  Brünig, Raimund ^a   Mensel, Karsten ^a   Kunze, Reinhard ^a   Schmidt, Hagen ^a  

^a IFW DRESDEN   (Germany)

Author keywords

Acoustic streaming; Actuator; Micromixer; SAW; Surface acoustic wave

Indexed keywords

ELECTRONIC DEVICE; ENVIRONMENTAL CONDITIONS; EXCITATION FREQUENCY; FREQUENCY RANGES; HIGH FREQUENCY SIGNALS; LOADING CONDITION; MICRO MIXERS; MICROMIXER; OPTIMAL EXCITATION FREQUENCY; OPTIMAL FREQUENCY; SURFACE ACOUSTIC WAVE; SURFACE ACOUSTIC WAVES; TEMPERATURE VARIATION;

ACOUSTIC STREAMING; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ACTUATORS; ELECTRIC CURRENTS; ELECTRON DEVICES; MIXERS (MACHINERY); THERMOELECTRIC EQUIPMENT;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 71549157106     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.277     Document Type: Conference Paper

References (6)

1. Schmidt, Kunze, Weihnacht, Investigation of Acoustomigration Effects in Al-based Metallizations, IEEE-ultrasonic symposium 2002, P3E-2.
2. Raml, Ruile, Characterization of Acoustomigration with On-Wafer Measurement System, IEEE-ultrasonic symposium 2001, 153
3. Sritharan, Strobl, Acoustic mixing at low Reynold's numbers, Applied Physics Letters 88, 054102, 2006
4. Nam-Trung Nguyen, Micromixers Fundamentals, Design and Fabrication, William Andrew Norwich, NY, USA, 2008
5. Nam-Trung Nguyen, Mikrofluidik: Entwurf Herstellung und Charakterisierung, Teubner Verlag, 2004
6. Yogesh B. Gianchandani ; Osamu Tabata ; Hans Zappe, Comprehensive microsystems, Band 2, Elsevier, 2008