An electrolysis-bubble-actuated micropump using electrowetting on dielectric (EWOD) for 1XN micro-sample switches

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 2018-2021

  Yang, Sang Chung ^a   Liu, Cheng Hsien ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Electrolytic bubble; EWOD; Micro flow switch; Micropump

Indexed keywords

BUBBLE ACTUATION; ELECTRO-WETTING ON DIELECTRICS; ELECTROLYTIC BUBBLE; HIGH POWER CONSUMPTION; MICRO FLOW SWITCHES; MICRO PUMP; MICRO-FLUID; OPERATION PRINCIPLES; SWITCH FUNCTION;

ACTUATORS; DIELECTRIC DEVICES; ELECTROCHEMISTRY; ELECTROLYSIS; MICROFLUIDICS; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; PUMPS; SURFACE PROPERTIES; SWITCHES;

SOLID-STATE SENSORS;

EID: 71449120273     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285659     Document Type: Conference Paper

References (5)

1. S. K. Cho, et al, "Splitting a liquid droplet for electrowetting-based microfluidics," ASME international Mechanical Engineering Congress and Exposition, November 11-16, 2001.
2. C. M. Cheng, et al "An Electrolysis-Bubble-Actuated Micropump based on the Roughness Gradient Design of Hydrophobic Surface," Journal of MicroElectroMechanical Systems 16 (5), pp. 1095-1105, 2007
3. G. B. Lee, B. H. Hwei, and G. R. Huang, "Micromachined pre-focused M X N flow switches for continuous multi-sample injection," J. Micromechan.Microeng., vol. 11, pp. 654-661, 2001.
4. C. G. Cameron, et al, "Reversible and Efficient Materials-based Actuation by Electrolytic Phase Transformation," Chemical Engineering & Technology, vol.26, pp. 1007-1011, 2003.
5. P. F. Man, C. H. Mastrangelo, M. A. Burns, and D. T. Burke, "Microfabricated Capillarity-Driven Stop Valve and Sample Injector," IEEE Micro Electro Mechanical Systems Workshop (MEM'98), pp. 45-50, 1998