Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymer

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1039-1042

  Shinohara, H ^a   Suzuki, T ^a   Mizuno, J ^a   Shoji, S ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

Cyclo olefin polymer; Direct bonding; Oxygen plasma; Vacuum ultraviolet light

Indexed keywords

CYCLO-OLEFIN POLYMERS; DIRECT BONDING; LOW TEMPERATURE BONDING; LOW TEMPERATURES; OXYGEN PLASMAS; POLAR FUNCTIONAL GROUPS; PRE-TREATMENT; ROOM TEMPERATURE; SURFACE ANALYSIS METHODS; VACUUM ULTRAVIOLET LIGHT; VACUUM ULTRAVIOLETS; XPS;

ACTUATORS; ANGLE MEASUREMENT; BINDING SITES; BONDING; CONTACT ANGLE; FLUORINE CONTAINING POLYMERS; FUNCTIONAL GROUPS; HYDROGEN BONDS; LUNAR SURFACE ANALYSIS; MICROSYSTEMS; OLEFINS; OXYGEN; PIEZOELECTRIC TRANSDUCERS; PLASMAS; POLYMERS; SATELLITE COMMUNICATION SYSTEMS; SURFACE ANALYSIS; ULTRAVIOLET RADIATION; VACUUM;

SOLID-STATE SENSORS;

EID: 71449113244     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285966     Document Type: Conference Paper

References (11)

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