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Volumn , Issue , 2009, Pages 983-986
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A micro gas preconcentrator with improved performances for environmental monitoring
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Author keywords
Carbon nanotubes; Gas sensors; Micro channel; Porous silicon; Pre concentrator
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Indexed keywords
ADSORBENT MATERIALS;
CYCLE TIME;
ENVIRONMENTAL MONITORING;
FUTURE APPLICATIONS;
GAS SENSORS;
MICRO-GAS;
MODES OF OPERATION;
OPTIMIZATION PROCESS;
OUTDOOR ENVIRONMENT;
PRE-CONCENTRATION;
PRE-CONCENTRATOR;
SILICON MICROCHANNELS;
SINGLE-WALL CARBON NANOTUBES;
ACTUATORS;
ADSORPTION;
CARBON NANOTUBES;
CONCENTRATION (PROCESS);
ENVIRONMENTAL ENGINEERING;
GAS DETECTORS;
MICROSYSTEMS;
MOISTURE;
OPTIMIZATION;
PIEZOELECTRIC TRANSDUCERS;
POROUS SILICON;
SINGLE-WALLED CARBON NANOTUBES (SWCN);
SOLID-STATE SENSORS;
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EID: 71449100552
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SENSOR.2009.5285982 Document Type: Conference Paper |
Times cited : (9)
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References (3)
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