A novel method for amorphous metal micromolding using carbon MEMS

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 188-191

  Martinez Duarte, R ^a   Madou, Marc J ^a   Kumar, G ^b   Schroers, J ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Yale University   (United States)

Author keywords

Bulk metallic glass; C MEMS; Carbon; LIGA; Microfabrication; Molds; Thermoplastic forming

Indexed keywords

AMORPHOUS METALS; ATOMIC SCALE; BULK METALLIC GLASS; C-MEMS; CARBON STRUCTURES; CRYSTALLINE DEFECTS; DIFFERENT GEOMETRY; ELASTIC STRAIN; HIGH STRENGTH; HIGH TEMPERATURE; LIGA; MASTER MOLDS; MECHANICAL STRENGTH; METAL ALLOYS; MICROMOLDING; NOVEL METHODS; SU-8 PHOTORESIST;

ACTUATORS; AMORPHOUS ALLOYS; AMORPHOUS CARBON; CORROSION RESISTANCE; GLASS; MEMS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; MICROMACHINING; MICROSYSTEMS; MOLDS; PHOTORESISTS; PIEZOELECTRIC TRANSDUCERS; REINFORCED PLASTICS; SOLID-STATE SENSORS;

METALLIC GLASS;

EID: 71449097023     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285533     Document Type: Conference Paper

References (8)

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4. J. Schroers, et al, "Blow molding of bulk metallic glass," Scripta Materialia, vol. 57, pp. 341-344, 2007.
5. G. Kumar, et al, "Write and erase mechanisms for bulk metallic glass," APL vol. 92, pp. 031901-3, 2008.
6. C. Wang, et al, "A Novel Method for the Fabrication of High Aspect Ratio C-MEMS Structures," J. Microelectromech. Syst., vol. 14, pp. 348-353, 2005.
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8. G. Kumar, et al, "Nanomoulding with amorphous metals", Nature vol. 7231, pp. 868-872, 2009.