Energy band-alignment of a multimetal-layer gated metal-oxide-semiconductor structure

Applied Physics Letters

Volumn 95, Issue 18, 2009, Pages

  Li, Zilan ^a,b   Houssa, Michel ^c   Schram, Tom ^a   De Gendt, Stefan ^a,c   De Meryer, Kristin ^a,b  

^a IMEC   (Belgium)

^b Katholieke Universiteit Leuven   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL EXPRESSIONS; ENERGY BAND; METAL OXIDE SEMICONDUCTOR STRUCTURES; METAL STACKS; MULTI-METALS; THIN METAL LAYERS;

ALIGNMENT; BAND STRUCTURE; DIELECTRIC DEVICES; GATE DIELECTRICS; GATES (TRANSISTOR);

METALS;

EID: 71049192854     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3243339     Document Type: Article

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