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Volumn 256, Issue 5, 2009, Pages 1313-1315
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Electron spectroscopies for simultaneous chemical and electrical analysis
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Author keywords
Auger electron spectroscopy; Avalanche photodiode; Electrical potential; High k; Semi insulating polycrystalline silicon (SIPOS); X ray photoelectron spectroscopy
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
AVALANCHE PHOTODIODES;
CHEMICAL ANALYSIS;
COMPOSITE FILMS;
ELECTRIC FIELDS;
ELECTRONS;
INTERFACES (MATERIALS);
OXIDE FILMS;
PHOTODIODES;
POLYCRYSTALLINE MATERIALS;
PROBES;
ELECTRICAL CONDUCTIVITY;
ELECTRICAL POTENTIAL;
ELEMENTAL COMPOSITIONS;
HIGH- K;
OXIDE/SEMICONDUCTOR INTERFACES;
POLYCRYSTALLINE FILM;
SEMI-INSULATING POLYCRYSTALLINE SILICONS;
SPECTROSCOPIC PROBES;
X RAY PHOTOELECTRON SPECTROSCOPY;
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EID: 70849099065
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2009.10.048 Document Type: Article |
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Times cited : (5)
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References (9)
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