Modification of Takaishi-Sensui formula for a diaphragm gauge system connected by an arbitrary length pipe

Vacuum

Volumn 84, Issue 5, 2009, Pages 729-733

  Iwata, Kenichi ^a   Kusumoto, Yoshiro ^a  

^a ULVAC INC   (Japan)

Author keywords

Diaphragm gauge; DSMC; Takaishi Sensui formula; Thermal transpiration

Indexed keywords

CAPACITANCE DIAPHRAGM GAUGES; CIRCULAR PIPE; DIRECT SIMULATION MONTE CARLO METHOD; DSMC; GAUGE SYSTEMS; HIGH PRESSURE; KNUDSEN NUMBERS; LONG PIPE; MAXWELL MODELS; PIPE WALLS; PRESSURE RATIO; RESCALING; S CURVE; THERMAL TRANSPIRATION; THERMAL TRANSPIRATION EFFECT; VACUUM SYSTEM; VACUUM VESSEL;

ASPECT RATIO; GAGES; PIPE; SIMULATORS; TRANSPIRATION; VACUUM;

DIAPHRAGMS;

EID: 70649110010     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.03.035     Document Type: Article

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