Construction and characterization of a sputter deposition system for coating granular materials

Vacuum

Volumn 84, Issue 4, 2009, Pages 453-457

  Hell, J ^a   Horkel, M ^a   Neubauer, E ^b   Eisenmenger Sittner, C ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b ARC SEIBERSDORF RESEARCH GMBH   (Austria)

Author keywords

Granular material; Heat sink materials; Magnetron sputter deposition; Metal matrix composites; Particle coating system; Particles

Indexed keywords

HEAT SINK MATERIALS; MAGNETRON SPUTTER DEPOSITION; METAL MATRIX COMPOSITES; PARTICLE COATING SYSTEM; PARTICLE COATINGS;

ADHESION; AGGLOMERATION; CARBON FIBERS; CARBON NANOFIBERS; CERAMIC MATRIX COMPOSITES; COATINGS; GRANULAR MATERIALS; HEAT SINKS; INDUSTRIAL DIAMONDS; LIGHT TRANSMISSION; MAGNETRONS; METALLIC MATRIX COMPOSITES; SPUTTER DEPOSITION;

PARTICLES (PARTICULATE MATTER);

EID: 70649103019     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.09.007     Document Type: Article

References (11)

1. Mikhailov S.N., Ariosa D., Weber J., Baer Y., Hänni W., Tang X.-M., et al. Diamond and Related Materials 4 (1995) 1137-1141
2. Yeh J.J., Pfeffer R.L., Cole M.W., Ohring M., and Yehoda J.E. Diamond and Related Materials 5 (1996) 1195-1203
3. Zhang H.D., Li H.Q., Song J.H., Tong Y.M., and Lu F.X. Applied Surface Science 246 (2005) 90-95
4. Massalski T.B., Okamoto H., Subramanian P.R., and Kacprzak L. Binary alloy phase diagrams. 2nd ed. vol. 1 (1990), ASM International, Ohio p. 839-40
5. Bunshah R.F., Blocher Jr. J.M., Bonifield T.D., Fish J.G., Ghate P.B., Jacobson B.E., et al. Deposition technologies for films and coatings (1982), Noyes Publications
6. Eisenmenger-Sittner C., Schrank C., Neubauer E., Eiper E., and Keckes J. Applied Surface Science 252 (2006) 5343-5346
7. Albert R., Pfeifer M.A., Barabási A.-L., and Schiffer P. Physical Review Letters 82 (1999) 205-208
8. Geng J., Howell D., Longhi E., Behringer R.P., Reydellet G., Vanel L., et al. Physical Review Letters 87 (2001) 035506-1-4
9. Horkel M., Mahr H., Hell J., Eisenmenger-Sittner C., and Neubauer E. Determination of the thickness of metal coatings on granular diamond materials by spatially resolved optical methods. Vacuum (2009) 10.1016/j.vacuum.2009.04.010
10. Neubauer E. Interface optimisation in copper carbon metal matrix composites, PhD Thesis, Vienna University of Technology, 2003.
11. Schwarz B., Schrank C., Eisenmenger-Sittner C., Stöger-Pollach M., Rosner M., and Neubauer E. Surface and Coatings Technology 200 16-17 (2006) 4891-4896