Helium ion beam microscopy for copper grain identification in BEOL structures

AIP Conference Proceedings

Volumn 1173, Issue , 2009, Pages 309-313

  Van Den Boom, Ruud J J ^a   Parvaneh, Hamed ^a   Voci, Dave ^b   Huynh, Chuong ^b   Stern, Lewis ^b   Dunn, Kathleen A ^a   Lifshin, Eric ^a  

^a STATE UNIVERSITY OF NEW YORK   (United States)

^b Carl Zeiss Vision Inc USA   (United States)

Author keywords

Copper; Electron microscopy; Focused ion beam; Grain identification; Helium ion microscope

Indexed keywords

EID: 70549106007     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3251241     Document Type: Conference Paper

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