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Applied Physics A: Materials Science and Processing

Volumn 97, Issue 4, 2009, Pages 745-750

Temperature dependence of a nanoporous Pd film hydrogen sensor based on an AAO template on Si

(4) TaşaltIn, Nevin a Öztürk, Sadullah a KIlInç, Necmettin a Ziya Öztürk, Zafer a

a GEBZE TECHNICAL UNIVERSITY (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

AAO TEMPLATE; AL FILMS; ANODIC ALUMINIUM OXIDE; ANODIZATIONS; DETECTION LIMITS; HYDROGEN CONCENTRATION; HYDROGEN SENSING PROPERTIES; HYDROGEN SENSOR; INTERPORE DISTANCES; NANO-POROUS; NANO-POROUS SURFACES; PD FILM; PD THIN FILMS; ROOM TEMPERATURE; SEM; SENSOR RESPONSE; SI SUBSTRATES; SILICON SUBSTRATES; TEMPERATURE DEPENDENCE; TRANSIENT METHOD;

CHEMICAL SENSORS; HYDROGEN; OXIDE FILMS; PALLADIUM; SCANNING ELECTRON MICROSCOPY;

SUBSTRATES;

EID: 70450230318 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-009-5440-7 Document Type: Article

Times cited : (30)

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