Reflectivity of an etched silicon surface with pyramids: II. Experimental results from different etching conditions

Journal of Micromechanics and Microengineering

Volumn 19, Issue 12, 2009, Pages

  Wu, Chen Jian ^a   Wei, Pal Jen ^a   Lin, Jen Fin ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENT HEIGHTS; ETCHANT CONCENTRATIONS; ETCHING CONDITION; ETCHING TEMPERATURE; OPTICAL TEST; SILICON SURFACES; SINGLE-CRYSTAL SILICON WAFERS;

ETCHING; OPTICAL SYSTEMS; OPTICAL TESTING; REFLECTION; SEMICONDUCTING SILICON COMPOUNDS; THERMAL EFFECTS;

SILICON WAFERS;

EID: 70450177799     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/12/125019     Document Type: Article

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