Nano-patterning by diffraction mask-projection laser ablation

Journal of Laser Micro Nanoengineering

Volumn 3, Issue 1, 2008, Pages 9-13

  Mäder, Marisa ^a   Zimmer, Klaus ^a   Böhme, Rico ^a   Höche, Thomas ^a   Gerlach, Jürgen W ^a   Rauschenbach, Bernd ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

Excimer laser; Laser ablation; Metal nano dots; Nano patterning; Phase mask

Indexed keywords

EID: 70449694560     PISSN: None     EISSN: 18800688     Source Type: Journal    
DOI: 10.2961/jlmn.2008.01.0003     Document Type: Article

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