Bonding-less (B-less) fabrication of polymeric microsystems

Microfluidics and Nanofluidics

Volumn 7, Issue 5, 2009, Pages 733-737

  Juchniewicz, Marcin ^a   Chudy, Michał ^a   Brzózka, Zbigniew ^a   Dybko, Artur ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

B less; Bonding less; Capillary film; Microchannel; Microfabrication; PDMS

Indexed keywords

B-LESS; CAPILLARY FILM; CAPILLARY FILMS; EMPTY SPACE; FABRICATION METHOD; MATRIX; NEW TECHNOLOGIES; PDMS; POLYDIMETHYLSILOXANE PDMS;

DISSOLUTION; EMULSIFICATION; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; MICROSYSTEMS; POLYMERS; SILICONES;

MICROCHANNELS;

EID: 70449532140     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-009-0472-z     Document Type: Article

References (7)

1. H Becker U Heim 2000 Hot embossing as a method for the fabrication of polymer high aspect ratio structures Sens Actuators A 83 130 135 10.1016/S0924-4247(00)00296-X (Pubitemid 30862316)
2. A Bertsch P Bernhard C Vogt P Renaud 2000 Rapid prototyping of small size objects Rapid Prototyping J 6 259 266 10.1108/13552540010373362
3. Guerin LJ, Bossel M, Demierre M, Calmes S, Renaud P (1997) Simple and low cost fabrication of embedded micro-channels by using a new thick-film photoplastic. In: TRANSDUCERS 97-1997 International conference on solid-state sensors and actuators, vol 2. Chicago, pp 1419-1422
4. Madou MJ (2002) Fundamentals of microfabrication: the science of miniaturisation, 2nd edn. CRC Press, Boca Raton
5. J Serbin A Ovsianikov B Chichkov 2004 Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties Opt Express 12 5221 5228 10.1364/OPEX.12.005221
6. JM Shaw JD Gelorme NC LaBianca WH Conley SJ Holmes 1997 Negative photoresists for optical lithography IBM J Res Develop 41 81 94
7. LJ Yang YT Chen SW Kang YC Wang 2004 Fabrication of SU-8 embedded microchannels with circular cross-section Int J Mach Tools Manuf 44 1109 1114 10.1016/j.ijmachtools.2004.02.021