A novel filter rating method using less than 30-nm gold nanoparticle and protective ligand

IEEE Transactions on Semiconductor Manufacturing

Volumn 22, Issue 4, 2009, Pages 452-461

  Mizuno, Takehito ^a   Namiki, Akihisa ^a   Tsuzuki, Shuichi ^a  

^a Nihon Pall Ltd   (Japan)

Author keywords

Filters; Gold; Membranes; Metals; Particle measurements

Indexed keywords

FILTERS; GOLD NANOPARTICLES; INDUCTIVELY COUPLED PLASMA MASS SPECTROMETER; MEMBRANE SURFACE; PARTICLE MEASUREMENTS;

INDUCTIVELY COUPLED PLASMA; LIGANDS; MASS SPECTROMETRY; NANOPARTICLES;

GOLD;

EID: 70449514026     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2009.2031762     Document Type: Conference Paper

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