SCOPUS 정보 검색 플랫폼

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7424, Issue , 2009, Pages

Laminar linear weak-link mechanisms with sub-centimeter travel range and sub-nanometer positioning resolution

(2) Shu, Deming a Maser, Jorg a,b

a ARGONNE NATIONAL LABORATORY (United States)

b ARGONNE NATIONAL LABORATORY (United States)

Author keywords

Flexure stage; Precision positioning; Sub nanometer positioning; Weak link stage

Indexed keywords

ATOMIC FORCE MICROSCOPES; FLEXURE STAGE; FLEXURE STAGES; HIGH-PRECISION; LAMINAR STRUCTURE; LINEAR MOTION; LINK MECHANISMS; MECHANICAL DESIGN; OVER-CONSTRAINED; POTENTIAL APPLICATIONS; PRECISION POSITIONING; SEMICONDUCTOR INDUSTRY; STRUCTURE STIFFNESS; SUB-NANOMETER POSITIONING; ULTRA PRECISION; WEAK-LINK STAGE;

SEMICONDUCTOR DEVICE MANUFACTURE; STIFFNESS; X RAY MICROSCOPES;

MACHINE DESIGN;

EID: 70449493186 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.824365 Document Type: Conference Paper

Times cited : (5)

References (13)

1
- 56249146429
- Proc. 8th Int. Conf. X-ray Microscopy
- July
- J. Maser et al., Proc. 8th Int. Conf. X-ray Microscopy, IPAP Conf. Series 7 (July 2006) 26-29.
- (2006) IPAP Conf. Series , vol.7 , pp. 26-29
- Maser, J.¹

2
- 33645279539
- H. C. Kang et al., Phys. Rev. Lett. 96, 127401 (2006).
- (2006) Phys. Rev. Lett , vol.96 , pp. 127401
- Kang, H.C.¹

3
- 35348838289
- Proc. 8th Int. Conf. X-ray Microscopy
- July
- D. Shu et al., Proc. 8th Int. Conf. X-ray Microscopy, IPAP Conf. Series 7 (July 2006) 56-58.
- (2006) IPAP Conf. Series , vol.7 , pp. 56-58
- Shu, D.¹

4
- 70449515875
- U.S. Patent granted No. 6,607,840, D. Shu, T. S. Toellner, and E. E. Alp, 2003
- U.S. Patent granted No. 6,607,840, D. Shu, T. S. Toellner, and E. E. Alp, 2003.

5
- 70449481867
- U.S. Patent granted No. 6,984,335, D. Shu, T. S. Toellner, and E. E. Alp, 2006
- U.S. Patent granted No. 6,984,335, D. Shu, T. S. Toellner, and E. E. Alp, 2006.

6
- 0035928286
- D. Shu, T. S. Toellner, and E. E. Alp, Nucl. Instrum. Methods A 467-468, 771-774 (2001).
- (2001) Nucl. Instrum. Methods A , vol.467-468 , pp. 771-774
- Shu, D.¹ Toellner, T.S.² Alp, E.E.³

7
- 70449481415
- D. Shu et al., SRI 2006, AIP CP879, (2007) 1073-1076.
- D. Shu et al., SRI 2006, AIP CP879, (2007) 1073-1076.

8
- 70449511917
- U.S. Patent application in progress for ANL-IN-08-013
- D. Shu and J. Maser, U.S. Patent application in progress for ANL-IN-08-013.
- Shu, D.¹ Maser, J.²

9
- 70449481416
- Physik Instrumente (PI) is a trademark of the Physik Instrumente GmbH & Co. Germany
- Physik Instrumente (PI) is a trademark of the Physik Instrumente GmbH & Co. Germany.

10
- 70449516888
- LDDM is a trademark of the Optodyne Inc., 1180 Mahalo Place, Compton, CA 90220, U.S.A.
- LDDM is a trademark of the Optodyne Inc., 1180 Mahalo Place, Compton, CA 90220, U.S.A.

11
- 0036452258
- D. Shu, Y. Han, T. S. Toellner, and E. E. Alp, Proc. SPIE Vol. 4771 (2002) 78-90.
- (2002) Proc. SPIE , vol.4771 , pp. 78-90
- Shu, D.¹ Han, Y.² Toellner, T.S.³ Alp, E.E.⁴

12
- 70449512857
- Portland, OR, Oct. 19-24
- rd ASPE Annual Meeting, Portland, OR, Oct. 19-24, 2008, pp23-26.
- (2008) rd ASPE Annual Meeting , pp. 23-26
- Shu, D.¹ Maser, J.²

13
- 70449514343
- Vibra-Metrics is a trademark of the MISTRAS Group, Inc., Princeton Junction, NJ 08550, U.S.A.
- Vibra-Metrics is a trademark of the MISTRAS Group, Inc., Princeton Junction, NJ 08550, U.S.A.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.