Thickness control of large area X-ray multilayers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7448, Issue , 2009, Pages

  Morawe, Ch ^a   Peffen, J Ch ^a  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

Deposition technology; X ray multilayers; X ray optics

Indexed keywords

3RD GENERATION; BRAGG PEAKS; D-SPACING; DEPOSITION TECHNOLOGY; FUTURE APPLICATIONS; GRAZING INCIDENCE; INTRINSIC ENERGY RESOLUTION; LINEAR MOTION; MULTILAYER DEPOSITIONS; MULTILAYER OPTICS; NUMERICAL MODELS; PARTICLE FLUXES; PARTICLE SOURCE; PHOTON ENERGY; PRECISE CONTROL; SYNCHROTRON SOURCE; THICKNESS DISTRIBUTIONS; THICKNESS GRADIENTS; THICKNESS PROFILES; X-RAY MULTILAYERS;

SYNCHROTRONS; THICKNESS CONTROL; X RAYS;

MULTILAYERS;

EID: 70449479871     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.826121     Document Type: Conference Paper

References (7)

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