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Volumn 6705, Issue , 2007, Pages
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The new ESRF multilayer deposition facility
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Author keywords
Sputter deposition; X ray multilayers; X ray optics
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Indexed keywords
COATINGS;
DEPOSITION;
FERROMAGNETIC MATERIALS;
MAGNETRON SPUTTERING;
STABILITY;
SYNCHROTRON RADIATION;
X-RAY MULTILAYERS;
X-RAY OPTICS;
MULTILAYERS;
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EID: 42149161886
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.734107 Document Type: Conference Paper |
Times cited : (32)
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References (7)
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