A fast-developing and low-cost characterization and test environment for a double axis resonating micromirror

3rd International Workshop on Advances in Sensors and Interfaces, IWASI 2009

Volumn , Issue , 2009, Pages 98-103

  Battini, Francesco ^a   Volpi, Emilio ^a   Marchetti, Eleonora ^a   Cecchini, Tommaso ^a   Sechi, Francesco ^a   Fanucci, Luca ^a   Hofmann, Ulrich ^b  

^a UNIVERSITY OF PISA   (Italy)

^b FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL EQUIVALENT; FINITE ELEMENT METHOD SIMULATION; INTELLIGENT SENSORS; MEASUREMENT RESULTS; MEASURING SYSTEMS; MICRO MIRROR; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; MICROELECTROMECHANICAL SYSTEMS; MIXED SIGNAL; MULTI DOMAINS; RESONANCE FREQUENCIES; SCANNING MICROMIRROR; TEST ENVIRONMENT; TESTING ENVIRONMENT;

COMPOSITE MICROMECHANICS; MECHANICS; MECHATRONICS; MEMS; RESONANCE; SENSORS; SIMULATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 70449395884     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IWASI.2009.5184777     Document Type: Conference Paper

References (8)

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