Optimization of silicon oxynitrides by plasma-enhanced chemical vapor deposition for an interferometric biosensor

Journal of Micromechanics and Microengineering

Volumn 19, Issue 9, 2009, Pages

  Choo, Sung Joong ^a   Lee, Byung Chul ^b   Lee, Sang Myung ^b   Park, Jung Ho ^a   Shin, Hyun Joon ^b  

^a Korea University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION REACTION; BIOCHEMICAL REACTIONS; BOVINE SERUM ALBUMINS; CLAD LAYER; GAS FLOWRATE; GAS FLOWS; GAS-FLOW RATIO; INTERFEROMETRIC SENSOR; MACH-ZEHNDER; RF-POWER; SILICON OXYNITRIDE LAYERS; SILICON OXYNITRIDES;

ADSORPTION; AERODYNAMICS; BIOSENSORS; BODY FLUIDS; FLOW OF GASES; INTEGRATED OPTOELECTRONICS; INTERFEROMETRY; OPTIMIZATION; PLASMA DEPOSITION; SILICON NITRIDE;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 70350680938     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/9/095007     Document Type: Article

References (25)

1. Cooper M A 2002 Nature Rev. Drug Discovery 1 515-28
2. Gauglitz G 2005 Anal. Bioanal. Chem. 381 141-55
3. Lambeck P V 2006 Meas. Sci. Technol. 17 R93-R116
4. Schmitt K, Oehse K, Sulz G and Hoffmann C 2008 Sensors 8 711-38
5. Homola J 2003 Anal. Bioanal. Chem. 377 528-39
6. Boyd R W and Heebner J E 2001 Appl. Opt. 40 5742-7
7. Piehler J, Brandenburg A, Brecht A, Wagner E and Gauglitz G 1997 Appl. Opt. 36 6554-62
8. Brynda E, Houska M, Brandenburg A and Wikerstal A 2002 Biosens. Bioelectron. 17 5742-7
9. Busse S, DePaoli M, Wenz G and Mittler S 2001 Sensors Actuators B 80 116-24
10. Prieto F, Seplvedal B, Calle A, Llobera A, Dominguez C, Abad A, Montoya A and Lechuga L M 2003 Nanotechnology 14 907-12
11. Seplvedal B, Rio J S, Moreno M, Blanco F J, Mayora K, Dominguez C and Lechuga L M 2006 J. Opt. A: Pure Appl. Opt. 8 s561-6
12. Lechuga L M 2006 Anal. Bioanal. Chem. 384 44-6
13. Blanco F J, Agirregabiria M, Berganzo J, Mayora K, Elizalde J, Calle A, Dominguez C and Lechuga L M 2006 J. Micromech. Microeng. 384 44-6
14. Ymeti A, Greve J, Lambeck P V, Wink T, van Hövell S W F M, Beumer T A M, Wijn R R, Heideman R G, Subramaniam V and Kanger J S 2007 Nano Lett. 7 394-7
15. Xu J, Suarez D and Gottfried D S 2007 Anal. Bioanal. Chem. 389 1193-9
16. Schmitt K, Schirmer B, Hoffmann C, Brandenburg A and Meyrueis P 2007 Biosens. Bioelectron. 22 2591-7
17. Daldosso N, Melchiorri M, Riboli F, Girardini M, Pucker G, Crivellari M, Bellutti P, Lui A and Pavesi L 2004 J. Lightwave Technol. 22 1734-40
18. Melchiorri M, Daldosso N, Sbrana F, Pavesi L, Pucker G, Kompocholis C, Bellutti P and Lui A 2005 Appl. Phys. Lett. 86 121111-3
19. Hussein M G, Wörhoff K, Sengo G and Driessen A 2007 Thin Solid Films 515 3779-86
20. Heideman R G and Lambeck P V 1999 Sensors Actuators B 61 100-27
21. Wong C K, Wong H, Kok C W and Chan M 2006 J. Cryst. Growth 288 171-5
22. http://www.lasurface.com
23. Gritsenko V A, Svitasheva S N, Petrenko I P, Novikov Y N, Morokov Y N, Wong H, Kwok R W M and Chan R W M 1998 Microelectron. Reliab. 38 745-51
24. Pogossian S P, Vescan L and Vonsovici A 1998 J. Lightwave Technol. 16 1851-3
25. Dell'Olio F, Passaro V M N and De Leonardis F 2007 Advances in Sensors and Interface, IWASI 2007, 2nd International Workshop pp 1-5