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Journal of Micromechanics and Microengineering

Volumn 19, Issue 9, 2009, Pages

Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems

(4) Mescheder, U a Muller B a Baborie, S a Urbanovic, P a

a FURTWANGEN UNIVERSITY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS COMPATIBLE; CORONA CHARGING; ELECTRET FILMS; ENERGY HARVESTER; ENERGY HARVESTING; ENERGY HARVESTING SYSTEMS; LONG TERM STABILITY; STABLE SURFACES; THERMAL OXIDES;

BORON; BORON COMPOUNDS; ELECTRETS; HARVESTING; ION BOMBARDMENT; PHOSPHORUS; POLYETHERIMIDES; SILICON COMPOUNDS;

ION IMPLANTATION;

EID: 70350676859 PISSN: 09601317 EISSN: 13616439 Source Type: Journal
DOI: 10.1088/0960-1317/19/9/094003 Document Type: Article

Times cited : (40)

References (11)

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