Common path two-wavelength homodyne counting interferometer development

Measurement Science and Technology

Volumn 20, Issue 8, 2009, Pages

  Ken, Petr ^a   Balling, Petr ^a  

^a CZECH METROLOGY INSTITUTE   (Czech Republic)

Author keywords

Elliptic regression; Homodyne; Interferometry; Linearity; Nanometrology

Indexed keywords

INTERFEROMETRY; REFRACTIVE INDEX;

AMBIENT AIR CONDITIONS; DIFFERENTIAL INTERFEROMETERS; ELLIPTIC REGRESSION; HOMODYNES; INTERFEROMETER FRINGES; LINEARITY; NANOMETROLOGY; REAL-TIME VALIDATION;

INTERFEROMETERS;

EID: 70350668792     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/8/084009     Document Type: Article

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