Production of B4C coatings by CVD method in a dual impinging-jet reactor: Chemical yield, morphology, and hardness analysis

AIChE Journal

Volumn 55, Issue 11, 2009, Pages 2914-2919

  Karaman, Mustafa ^a   Sezgi, N Asli ^a   Özbelge, H Önder ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Boron carbide; Ceramics; Chemical vapor deposition; Refractory carbides

Indexed keywords

CERAMICS; CHEMICAL VAPOR DEPOSITION REACTORS; CHEMICAL YIELDS; CRYSTALLINE REGIONS; CVD METHOD; FTIR ANALYSIS; HARDNESS VALUES; HIGH HARDNESS; LOW SUBSTRATE TEMPERATURE; MICROHARDNESS ANALYSIS; MICRON SIZE; PARALLEL REACTIONS; PRODUCT MORPHOLOGY; REFRACTORY CARBIDES; TUNGSTEN SUBSTRATE; XRD ANALYSIS;

BORON; BORON CARBIDE; CERAMIC MATERIALS; CHEMICAL ANALYSIS; CRYSTAL IMPURITIES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; JETS; MORPHOLOGY; REFRACTORY MATERIALS; SUBSTRATES; TUNGSTEN;

CHEMICAL VAPOR DEPOSITION;

EID: 70350623180     PISSN: 00011541     EISSN: 15475905     Source Type: Journal    
DOI: 10.1002/aic.11900     Document Type: Article

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