CVD of boron and dichloroborane formation in a hot-wire fiber growth reactor

Chemical Engineering and Processing

Volumn 40, Issue 6, 2001, Pages 525-530

  Sezgi, N A ^a   Ersoy, A ^a   Dogu, T ^a   Ozbelge H O ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Boron fibers; CVD; Dichloroborane; Reaction kinetics

Indexed keywords

BORON; CHEMICAL VAPOR DEPOSITION; DIFFUSION; EFFLUENTS; INFRARED SPECTROPHOTOMETERS; REDUCTION; SUBSTRATES;

HOT-WIRE FIBER GROWTH REACTORS;

CHEMICAL REACTORS;

BORON; COMPOSITE; FIBER; GAS-SOLID MIXING;

EID: 0034740740     PISSN: 02552701     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0255-2701(00)00150-1     Document Type: Article

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