Spherical MgO microparticle deposition by RF impulse discharge with small coaxial electrodes

Thin Solid Films

Volumn 518, Issue 3, 2009, Pages 1012-1015

  Muraoka, Takumasa ^a   Kashimura, Toru ^a   Iizuka, Satoru ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

MgO; RF impulse discharge; Spherical nanoparticle; Sputtering

Indexed keywords

COAXIAL ELECTRODES; FORMATION PROCESS; GLASS SURFACES; GLASS TUBES; IMPULSE DISCHARGES; MGO; MICRO-PARTICLES; RAMAN ANALYSIS; RF IMPULSE DISCHARGE; RING ELECTRODES; SEM; SMALL-DIAMETER; SPHERICAL NANOPARTICLE; SPHERICAL PARTICLE; SPHERICAL SHAPE;

ELECTRODES; GLASS; NANOPARTICLES; PARTICLE SIZE ANALYSIS; SPHERES;

ELECTRIC DISCHARGES;

EID: 70350502624     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.07.177     Document Type: Article

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