Nanometer-/Subnanometer-Positioning Technology Using Feeding Mechanism

International Journal of Automation Technology

Volumn 2, Issue 1, 2008, Pages 4-11

  Otsuka, Jiro ^a  

^a SHIZUOKA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

ball screw; linear motor; nanometer posi tioning; nanotechnology; ultraprecision positioning

Indexed keywords

LINEAR MOTORS;

BALL-SCREW; FEEDING MECHANISM; MICROPROCESSOR CONTROLLED; NANOMETER POSI-TIONING; NANOMETER RESOLUTIONS; POSITIONING ACCURACY; POSITIONING DEVICES; POSITIONING TECHNOLOGIES; SUB NANOMETERS; ULTRAPRECISION POSITIONING;

BALL SCREWS;

EID: 70350122233     PISSN: 18817629     EISSN: 18838022     Source Type: Journal    
DOI: 10.20965/ijat.2008.p0004     Document Type: Article

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