Development of small ultraprecision displacement sensor and small ultraprecision positioning device with 1 nm resolution;Development of small ultraprecision displacement sensor and small ultraprecision positioning device with 1 nm resolution

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 69, Issue 10, 2003, Pages 1428-1433

  Otsuka, Jiro ^a   Ichkawa, Soji ^a   Yamaguchi, Yoshiyuki ^a  

^a NONE

Author keywords

1 nm resolution; Coarse and fine positioning; Diffiaction displacement sensor; Feedback displacement sensor; Linear encoder; Ultraprecision positioning

Indexed keywords

DIFFRACTION GRATINGS; ERROR ANALYSIS; NANOTECHNOLOGY; OPTICAL RESOLVING POWER;

1 NM RESOLUTION; DIFFRACTION DISPLACEMENT SENSOR; FEEDBACK DISPLACEMENT SENSOR; LINEAR ENCODER;

SENSORS;

EID: 27344460273     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.69.1428     Document Type: Article

References (15)