Ultraprecision machining techniques for the fabrication of freeform surfaces in highly integrated optical microsystems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7426, Issue , 2009, Pages

  Stoebenau, Sebastian ^a   Sinzinger, Stefan ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATION CORRECTION; ASPHERICAL; BEAM-SHAPING; COMPUTATIONAL IMAGING; COUPLING PRISMS; DEGREES OF FREEDOM; DIAMOND TURNING; FABRICATION TECHNIQUE; FLAT SURFACES; FREE-FORM SURFACE; FREEFORMS; HIGH ASPECT RATIO; HIGHLY INTEGRATED; IMAGING ELEMENTS; MICRO MILLING; MONOLITHICALLY INTEGRATED; MULTI-AXIS; OPTICAL ELEMENTS; OPTICAL MICROSYSTEMS; RADII OF CURVATURE; ROUGHNESS HEIGHT; SPATIAL FREQUENCY; ULTRAPRECISION MACHINING;

ASPECT RATIO; FABRICATION; MICROMACHINING; MILLING (MACHINING); MONOLITHIC INTEGRATED CIRCUITS; POLISHING; TURNING;

MICROSYSTEMS;

EID: 70349932057     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.826538     Document Type: Conference Paper

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