Calculating BRDFs from surface PSDs for moderately rough optical surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7426, Issue , 2009, Pages

  Harvey, James E ^a   Choi, Narak ^a   Krywonos, Andrey ^a   Marcen, Jesus G ^b  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b UNIVERSIDAD COMPLUTENSE DE MADRID   (Spain)

Author keywords

Bidirectional Reflectance Distribution Function (BRDF); Scattering from Rough surfaces

Indexed keywords

BIDIRECTIONAL REFLECTANCE DISTRIBUTION FUNCTION (BRDF); DYNAMIC RANGE; HANKEL TRANSFORM; IMAGE DEGRADATION; IMAGING APPLICATIONS; OPTICAL SURFACES; PRACTICAL USE; RAYLEIGH; ROUGH SURFACES; SCATTERED RADIATIONS; SCATTERING FROM ROUGH SURFACES; SHORT WAVELENGTHS; SMOOTH SURFACE; SPATIAL FREQUENCY; SURFACE APPROXIMATION; SURFACE METROLOGY; SURFACE SCATTER;

APPROXIMATION ALGORITHMS; DISTRIBUTION FUNCTIONS; IMAGE ANALYSIS; IMAGE QUALITY; MINES; OPTOELECTRONIC DEVICES; PHOTOLITHOGRAPHY; REFLECTION; SCATTERING;

SURFACE MEASUREMENT;

EID: 70349920670     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.831302     Document Type: Conference Paper

References (11)

1. J. C. Stover, Optical Scattering, Measurement and Analysis, 2nd Edition, SPIE Press, Bellingham, WA (1995).
2. S. O. Rice, "Reflection of electromagnetic waves from slightly rough surfaces," Commun. Pure Appl. Math. 4, 351 (1951).
3. P. Beckmann and A. Spizzichino, The Scattering of Electromagnetic Waves from Rough Surfaces, Pergamon Press, New York (1963).
4. A. Krywonos, Predicting Surface Scatter using a Linear Systems Formulation of Non-paraxial Scalar Diffraction, Ph.D. Dissertation, College of Optics and Photonics, University of Central Florida (2006).
5. J. E. Harvey, A. Krywonos, and J. C. Stover "Unified Scatter Model for Rough Surfaces at Large Incident and Scattered Angles", Invited Paper presented at SPIE's International Symposium on Optics and Photonics, San Diego, CA, August 2007; published in Proc. SPIE 6672-6712 (August 2007).
6. E. L. Church and P. Z. Takacs, "The optimal estimation of finish parameters", Proc. SPIE 1530, p. 71-78 (1991).
7. A. J. S. Hamilton, "Uncorrelated Modes of Nonlinear Power Spectrum", Monthly Notices of the Roy. Astron. Soc. 312, 257-284 (2000).
8. J. E. Harvey, C. L. Vernold, A. Krywonos, and P. L. Thompson, "Diffracted Radiance: A Fundamental Quantity in Non-Paraxial Scalar Diffraction Theory", Appl. Opt. 38, 6469-6481 (November 1999).
9. J. E. Harvey, C. L. Vernold, A. Krywonos, and P. L. Thompson, "Diffracted Radiance: A Fundamental Quantity in Non-Paraxial Scalar Diffraction Theory: Eratta", Appl. Opt. 39, 6374-6375 (Dec. 1, 2000).
10. J. E. Harvey and A. Krywonos, "Improved Characterization of Optical Surfaces from Scattered Light Measurements", presented at OSA Topical Meeting on Optical Interference Coatings, Tucson, AZ, June 4-7, 2007; Summary published in Conference Proceedings.
11. J. C. Stover and J. E. Harvey, "Limitations of Rayleigh-Rice Perturbation Theory for Describing Surface Scatter", Invited Paper presented at SPIE's International Symposium on Optics and Photonics, San Diego, CA, August 2007; published in Proc. SPIE 6672-6711 (August 2007).