Molecular recognition in self-assembled integrated circuits: getting smaller while under control

Angewandte Chemie - International Edition

Volumn 48, Issue 19, 2009, Pages 3394-3396

  Lim, Yong Beom ^a   Lee, Myongsoo ^a  

^a Yonsei University   (South Korea)

Author keywords

Block copolymers; Lithography; Molecularrecognition; Self assembly; Semiconductors

Indexed keywords

BLOCK COPOLYMER LITHOGRAPHY; FABRICATION TIME; HYDROGEN BONDINGS; SELF ASSEMBLY PROCESS; SELF-ASSEMBLED; SEMICONDUCTORS; SILICON SUBSTRATES; SQUARE ARRAY;

BLOCK COPOLYMERS; COPOLYMERIZATION; HYDROGEN; MOLECULAR BIOLOGY; MOLECULAR RECOGNITION; SELF ASSEMBLY;

INTEGRATED CIRCUITS;

EID: 70349915688     PISSN: 14337851     EISSN: None     Source Type: Journal    
DOI: 10.1002/anie.200805687     Document Type: Article

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