Microfluidic design and fabrication of wafer-scale varifocal liquid lens

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7426, Issue , 2009, Pages

  Lee, Jeong Yub ^a   Choi, Seung Tae ^a   Lee, Seung Wan ^a   Kim, Woonbae ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Accurate optical fluid drop; Actuator attachment; Auto focus; Microfluidic design; Pressing bonding process in vacuum; Seal dispensing; Varifocal liquid lens; Wafer level process

Indexed keywords

ACCURATE OPTICAL FLUID DROP; AUTO FOCUS; PRESSING BONDING PROCESS IN VACUUM; VARIFOCAL LIQUID LENS; WAFER-LEVEL PROCESS;

ACTUATORS; ASPECT RATIO; BONDING; DESIGN; ELECTROMECHANICAL DEVICES; FABRICATION; FLUIDIC DEVICES; LIQUIDS; MEMS; MICROCHANNELS; MICROFLUIDICS; MICROLENSES; OPTICAL INSTRUMENTS; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SILICON WAFERS; SILICONES; VACUUM;

WAFER BONDING;

EID: 70349911478     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.825064     Document Type: Conference Paper

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