Direct bonding SOl wafer based MEMS cantilever resonator for trace gas sensor applicaiton

4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Volumn , Issue , 2009, Pages 134-138

  Ying, Dong ^a   Wei, Gao ^a   Zheng, You ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Cantilever; Gas sensor; Resonator; SOL wafer

Indexed keywords

A-THERMAL; CANTILEVER; CANTILEVER RESONATORS; DIRECT BONDING; EXPERIMENTAL TEST; FABRICATION PROCESS; FINITE ELEMENT ANALYSIS; GAS SENSING MATERIAL; GAS SENSOR; HIGH SENSITIVITY; INDUCTIVE COUPLED PLASMA; MICROMACHING; PIEZORESISTIVE SENSING; PRECISE CONTROL; RESONATOR PARAMETERS; SEMICONDUCTOR PROCESS; SILICON-ON-INSULATORS; SIMULATION RESULT; TEST RESULTS; TRACE GAS DETECTION; TRACE-GAS SENSORS; UNIFORM TEMPERATURE; VIBRATION STRUCTURE;

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; FABRICATION; GAS DETECTORS; GASES; INDUCTIVELY COUPLED PLASMA; MEMS; MICROELECTROMECHANICAL DEVICES; NANOCANTILEVERS; RESONATORS; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SOLS;

WAFER BONDING;

EID: 70349677394     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2009.5068543     Document Type: Conference Paper

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