A high- Q hybrid acoustic mode in thin film ZnO solidly mounted resonators

Applied Physics Letters

Volumn 95, Issue 12, 2009, Pages

  Wathen, Adam D ^a   Munir, Farasat ^a   Hunt, William D ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC EFFECTS; ACOUSTIC MODE; ACOUSTIC VELOCITY; ELECTRODE GEOMETRIES; ELECTROMAGNETIC RADIATIVE; EXCITATION WAVELENGTH; HIGH FREQUENCY FILTERS; LONGITUDINAL MODES; RESONANT FREQUENCIES; SENSING APPLICATIONS; SMALL DEVICES; SOLIDLY MOUNTED RESONATOR; THICKNESS-SHEAR; ZNO;

ACOUSTICS; NATURAL FREQUENCIES; RESONATORS; SEMICONDUCTING ZINC COMPOUNDS; ZINC OXIDE;

ACOUSTIC RESONATORS;

EID: 70349673174     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3238265     Document Type: Article

References (7)

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