A novel 3D flexible parylene-metal structure fabrication technique

4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Volumn , Issue , 2009, Pages 907-910

  Huang, Xianju ^a   Tang, Yu ^a   Wang, Renxin ^a   Qian, Chuang ^a   Wang, Wei ^a   Li, Zhihong ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

3D microelectrode arrays; 3D silicon mold; BioMEMS; Neural prosthesis; Parylene C

Indexed keywords

3D MICROELECTRODE ARRAYS; 3D SILICON MOLD; BIOMEMS; NEURAL PROSTHESIS; PARYLENE C;

BIOCHIPS; METALS; MICROELECTRODES; MOLDS; OPHTHALMOLOGY; PROSTHETICS; REACTIVE ION ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; STRUCTURAL METALS; SURFACE DEFECTS;

THREE DIMENSIONAL;

EID: 70349665564     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2009.5068721     Document Type: Conference Paper

References (9)

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