Porosity evaluation of TiO2 thin films deposited using pulsed DC-magnetron sputtering

Medziagotyra

Volumn 15, Issue 2, 2009, Pages 103-107

  Čyviene, Jurgita ^a,b   Milčius, Darius ^a   Laukaitis, Giedrius ^b  

^a LITHUANIAN ENERGY INSTITUTE   (Lithuania)

^b KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Bias voltage; Optical constants; Porosity; Pulsed dc magnetron sputtering; Thin films; TiO2; Titanium oxide

Indexed keywords

EID: 70349524926     PISSN: 13921320     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)

1. Karunagaran, B., Rajendra Kumar, R. T., Viswanathan, C., Mangalaraj, D. Optical Constants Of DC Magnetron Sputtered Titanium Dioxide Thin Films Measured By Spectroscopic Ellipsometry Crystal Research and Technology 38 (9) 2003: pp. 773 - 778.
2. Nowotny, J., Bak, T., Nowotny, M. K., Sheppard, L. R. Titanium Dioxide for Solar-hydrogen, Functional Properties International Journal of Hydrogen Energy 32 2007: pp. 2609 - 2629.
3. 2Gas Sensor Nanostructured Materials 7 1996: p. 709.
4. 2 Anatase Thin Films as Gas Sensors Sensors and Actuators B-Chemical 26 1995: pp. 71 - 75.
5. Fujishima, A., Hashimoto, K., Watanabe, T. TiO Photocatalysis Fundamentals and Applications 1999: pp. 14 - 176.
6. 2 Films Deposited by Different Techniques Thin Solid Films 197 1991: p. 279.
7. 2/(Indium Tin Oxide) Multilayer Film; a Transparent IR Reflector Thin Solid Films 116 1984: pp. 155 - 157.
8. 2: Influence of Carrier Gas Electrochemical Society 137 1990: p. 1206.
9. Norby, T. Solid State Protonic Conductors - Principles, Properties, Progress, and Prospects Solid State Ionics 125 1999: pp. 1 - 11.
10. 2 Thin Films by Sulfuric Acid Treatment Applied Catalysis B: Environmental 36 2002: pp. 31 - 43.
11. Lu, J. P., Wang, J., Raj, R. Solution Precursor Chemical Vapor Deposition of Titanium Oxide Thin Films. Thin Solid Films 204 1991: pp. L13 - L17.
12. Miyaki, S., Kobayashi, T., Satou, M., Fijimoto, F. Titanium Oxide Formation by Dynamic Ion Beam Mixing. Vacuum Science and Technology A9 1991: pp. 3036 - 3040.
13. Phair, J. W., Badwal, S. P. S. Materials for Separation Membranes in Hydrogen and Oxygen Production and Future Power Generation Science and Technology of Advanced Materials 7 2007: pp. 792 - 805.
14. 3 Sol-gel Thin Films. Thin Solid Films 458 2004: pp. 92 - 97.
15. Bunshah, R. F. Coating Processes, (Noyes Publications) Deposition Technologies for Films and Coatings. Developments and Applications 1982: p. 585.
16. Thornton, J. A. Influence of Apparatus Geometry and Deposition Conditions on the Structure and Topography of Thick Sputtered Coatings Journal of Vacuum Science and Technology 11 1974: pp.666 - 670.
17. 2 Films with High Refractive Index Deposited by Pulsed Bias Arc Ion Plating Surface & Coatings Technology 201 2007: pp. 7252 - 7258.