Theoretical analyses of chemical reactions for forming hydrocarbon-bridged SiOCH low-k Films in PECVD processes

Proceedings of the 2009 IEEE International Interconnect Technology Conference, IITC 2009

Volumn , Issue , 2009, Pages 116-118

  Tajima, N ^a   Ohashi, Y ^b   Nagano, S ^b   Xu, Y ^c   Matsumoto, S ^c   Kada, T ^c   Ohno, T ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b TAIYO NIPPON SANSO CORPORATION   (Japan)

^c Tri Chemical Laboratories Inc   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING REACTIONS; HYDROCARBON BRIDGES; HYDROCARBON COMPONENTS; IONIC SPECIES; LOW-K FILMS; POLYMERIZATION REACTION; RADICAL SPECIES; TERMINAL ATOM;

ATOMS; FREE RADICAL POLYMERIZATION; GRAFTING (CHEMICAL); HYDROCARBONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SYNTHESIS (CHEMICAL);

SILICON;

EID: 70349451844     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IITC.2009.5090357     Document Type: Conference Paper

References (9)

1. N. Tajima et al., Jpn. J. Appl. Phys., 46, 5970 (2007).
2. D. Geraud et al., Proc. IEEE IITC, 226 (2005).
3. K. Watanabe et al., Proc. AMC 2006, pp. 307-312 (2006).,
4. M. Shimada et al., ADMETA 2008, pp. 34-35 (2008).,
5. S. Gates et al., AMC 2008, pp. 66-67 (2008).
6. A. D. Becke, J. Chem. Phys., 98, 5648 (1993).
7. T. H. Dunning Jr., J. Chem. Phys., 90, 1007 (1989).,
8. D. E. Woon and T. H. Dunning Jr., J. Chem. Phys., 98, 1358 (1993).
9. Gaussian 03, Revision A.1, J. A. Pople et al., Gaussian, Inc., Pittsburgh, 2003.