Study of the high-frequency inductive coupled discharge plasma interaction with walls

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  Skudra, Atis ^a   Revalde, Gita ^a   Gavare, Zanda ^a   Silinsh, Juris ^a   Zorina, Natalia ^a   Polyakov, Boriss ^a  

^a UNIVERSITY OF LATVIA   (Latvia)

Author keywords

Atomic force microscopy (AFM); Low pressure discharges; Modification; Optical emission spectroscopy (OES); Plasma treatment; Surface modification

Indexed keywords

ATOMIC FORCE MICROSCOPY (AFM); LOW-PRESSURE DISCHARGES; MODIFICATION; PLASMA TREATMENT; SURFACE MODIFICATION;

ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; EMISSION SPECTROSCOPY; HELIUM; LEAKAGE (FLUID); LIGHT; LIGHT EMISSION; LIGHT SOURCES; OPTICAL EMISSION SPECTROSCOPY; OPTICAL MICROSCOPY; OXYGEN; PHOTORESISTS; PLASMA APPLICATIONS; PLASMA INTERACTIONS; PLASMA THEORY; SURFACE DISCHARGES; SURFACE STRUCTURE;

SURFACE TREATMENT;

EID: 70349419694     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200732322     Document Type: Conference Paper

References (10)

1. O. Adams, Lights Res. Technol. 1978, 10, 83.
2. H. D. Witrke, "Recent Studies on Fused Quartz and Synthetic Fused Silicia for Light Sources", in: Proceedings of LS - 9, R. S. Bergman, Cornell University Press, New York 2001, p. 357.
3. A. Schreiber, B. Kuhn, E. Arnold, F.-J. Schilling, H.-D. Witzke, J. Phys. D: Appl. Phys. 2005, 38, 3242.
4. C. V. Varanasi, T. R. Brumleve, "Analyses of Electrodes from Metal Halide Lamps", in: Proceedings of LS - 9, R. S. Bergman, Cornell University Press, New York 2001, p. 227.
5. W. van Erk, P. H. L. M. Cobben, P. Bennema, Electrochem. Soc. 1994, 94, 94.
6. R. Ramaiah, "Metal Halide Lamps with Improved Lumen Maintenance", in: Proceedings of LS - 9, R. S. Bergman, Cornell University Press, New York 2001, p. 65.
7. G. Revalde, N. Denisova, Z. Gavare, A. Skudra, JQSRT 2005, 94, 311.
8. R. B. Piejak, V. A. Godyak, B. M. Alexandrovich, Plasma Sources Sci. Technol. 1992, 1, 179.
9. K. J. Ziegler, B. Polyakov, J. S. Kulkarni, T. A. Crowley, K. M. Ryan, M. A. Morris, D. Erts, J. D. Holmes, J. Mater. Chem. 2004, 14, 585-589.
10. K.-B. Lim, D.-C. Lee, Surf. Interface Anal. 2004, 36, 254.