Linearized gimbal-less two-axis MEMS mirrors

Conference on Optical Fiber Communication, Technical Digest Series

Volumn , Issue , 2009, Pages

  Milanovic, Veljko ^a  

^a Mirrorcle Technologies Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMBDRIVE; DRIVING SCHEMES; LOW POWER; MEMS MIRRORS; OPTICAL BEAM SCANNING; SINGLE CRYSTAL SILICON; TWO-AXIS;

LINEARIZATION; MEMS; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL FIBERS; OPTICAL MATERIALS;

OPTICAL COMMUNICATION;

EID: 70349278787     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. V. Milanovì, "Multilevel-Beam SOI-MEMS Fabrication and Applications," IEEE/ASME Journal of Microelectromechanical Systems, vol.13, no.1, pp. 19-30, Feb. 2004.
2. V. Milanovì, D. T. McCormick, G. Matus, "Gimbal-less Monolithic Silicon Actuators For Tip-Tilt-Piston Micromirror Applications," IEEE J. of Select Topics in Quantum Electronics,Volume: 10 , Issue:3 , May-June 2004, Pages:462 - 471.
3. Veljko Milanovì, Wing Kin Lo, "Fast and High-Precision 3D Tracking and Position Measurement with MEMS Micromirrors," 2008 IEEE/LEOS Optical MEMS and Their Applications Conf., Freiburg, Germany, Aug. 12, 2008.
4. Veljko Milanovì, Kenneth Castelino, Daniel McCormick, "Highly Adaptable MEMS-based Display with Wide Projection Angle," 2007 IEEE Int. Conf. on Microelectromechanical Systems (MEMS'07), Kobe, Japan, Jan. 25, 2007.