Sensitivity to NH3 of SnO2 thin films prepared by magnetron sputtering

International Siberian Conference on Control and Communications, SIBCON-2009; Proceedings

Volumn , Issue , 2009, Pages 189-193

  Anisimov, O V ^a   Maksimova, N K ^a   Chernikov, E V ^a   Sevastyanov, E Y ^a   Sergeychenko, N V ^a  

^a TOMSK STATE UNIVERSITY   (Russian Federation)

Author keywords

Gas sensors; Sensing properties; Thin films

Indexed keywords

FAST RESPONSE; GAS SENSING CHARACTERISTICS; GAS SENSORS; HIGH SENSITIVITY; MICROELECTRONIC TECHNOLOGIES; OPERATIONAL TEMPERATURE; RECOVERY TIME; SENSING PROPERTIES; SURFACE DOPING; TEMPERATURE RANGE; THIN FILM SENSORS;

AMMONIA; GAS DETECTORS; PLATINUM; THIN FILMS;

SENSORS;

EID: 70349266469     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SIBCON.2009.5044854     Document Type: Conference Paper

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