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Japanese Journal of Applied Physics

Volumn 48, Issue 6 PART 2, 2009, Pages

A micromachined flexible hollow cathode discharge device

(4) Kim, Geunyoung a Kim, Kang Il a Yang, Sang Sik a Oh, Soo Ghee a

a Ajou University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANODE LAYERS; APPLIED VOLTAGES; ARGON GAS; DISCHARGE TESTS; HIGH CURRENT DENSITIES; HOLE DIAMETER; HOLLOW CATHODE DISCHARGE; HOLLOW CATHODES; INSULATION LAYERS; MICROMACHINED; MICROMACHINING TECHNOLOGIES; OPERATING VOLTAGE; ROOM TEMPERATURE; THREE-LAYER;

ALUMINA; ARGON; ATMOSPHERIC PRESSURE; BUILDING MATERIALS; DIELECTRIC PROPERTIES; INSULATION; MECHANICAL PROPERTIES; MECHANICAL STABILITY; POLYIMIDES;

INDUCTIVELY COUPLED PLASMA;

EID: 70249084892 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.48.06FK07 Document Type: Article

Times cited : (3)

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