Fabrication and characterization of yttria-stabilized zirconia membranes for micro solid oxide fuel cells

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7362, Issue , 2009, Pages

  Garbayo, Íñigo ^a   Tarancon A ^a   Santiso, J ^b   Cavallaro, A ^b   Roqueta, J ^b   Garcia, G ^c   Gracia I ^a   Cane C ^a   Sabate N ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b CSIC   (Spain)

^c UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

Micro Solid Oxide Fuel Cell (micro SOFC); Microfabrication; Power MEMS; Pulsed Laser Deposition (PLD); Self supported membranes; Yttria Stabilized Zirconia (YSZ)

Indexed keywords

ANNEALING TREATMENTS; DEPOSITION PROCESS; DEPOSITION TEMPERATURES; ELECTRICAL CHARACTERIZATION; FREE STANDING MEMBRANES; MECHANICAL STUDY; MICRO DEVICES; MICRO SOLID OXIDE FUEL CELL (MICRO SOFC); MICRO SOLID OXIDE FUEL CELLS; MICROMACHINED; POWER MEMS; PROCESSING PARAMETERS; PULSED-LASER DEPOSITION TECHNIQUE; SELF-SUPPORTED MEMBRANES; SILICON-BASED; SURFACE AREA; THERMOMECHANICAL STABILITY; YTTRIA-STABILIZED ZIRCONIA (YSZ); YTTRIA-STABILIZED ZIRCONIA MEMBRANES; YTTRIA-STABILIZED ZIRCONIA THIN FILMS;

ACTUATORS; CELL MEMBRANES; DEPOSITION; LASERS; MEMBRANES; MEMS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; MICROMACHINING; NICKEL OXIDE; OXIDE FILMS; PROGRAMMABLE LOGIC CONTROLLERS; PULSED LASER DEPOSITION; SMART SENSORS; SOLID OXIDE FUEL CELLS (SOFC); STRESSES; THERMOMECHANICAL TREATMENT; YTTRIUM ALLOYS; ZIRCONIA;

YTTRIA STABILIZED ZIRCONIA;

EID: 69949157256     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.821613     Document Type: Conference Paper

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