Research on the measurement of thin film thickness based on phase shift interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7283, Issue , 2009, Pages

  Shi, Yi Lei ^a   Su, Jun Hong ^a   Yang, Li Hong ^a   Xu, Jun Qi ^a  

^a XI'AN TECHNOLOGICAL UNIVERSITY   (China)

Author keywords

Measurement; Phase shift interferometry; Thickness; Thin film

Indexed keywords

ACCURATE MEASUREMENT; DIGITAL ACQUISITION; INTERFERENCE FRINGE; INTERFEROGRAMS; MEASUREMENT METHODS; MULTI-FRAME; NON-CONTACT; PHASE INFORMATION; PHASE-SHIFT INTERFEROMETRY; PZT; REFERENCE MIRRORS; THICKNESS; TWYMAN-GREEN INTERFEROMETERS;

FILM THICKNESS; INTERFEROMETERS; INTERFEROMETRY; MAGNETIC FILMS; MEASUREMENT THEORY; OPTICAL TESTING; PHASE SHIFT; PIEZOELECTRIC TRANSDUCERS; TECHNOLOGY; THICKNESS MEASUREMENT; THIN FILM DEVICES; THIN FILMS; VAPOR DEPOSITION;

FILM PREPARATION;

EID: 69949137360     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.828754     Document Type: Conference Paper

References (6)

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