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Volumn 234, Issue 1-6, 2004, Pages 269-276
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Measurement of thin film thickness by electronic speckle pattern interferometry
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Author keywords
[No Author keywords available]
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Indexed keywords
CAMERAS;
CHARGE COUPLED DEVICES;
ELECTRIC FIELD EFFECTS;
FAST FOURIER TRANSFORMS;
IMAGE PROCESSING;
INTERFEROMETERS;
INTERFEROMETRY;
LIGHT INTERFERENCE;
PHASE SHIFT;
SPECKLE;
VECTORS;
ELECTRONIC SPECKLE PATTERN INTERFEROMETRY (ESPI);
MICHELSON INTERFEROMETERS;
THIN FILMS;
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EID: 1842615022
PISSN: 00304018
EISSN: None
Source Type: Journal
DOI: 10.1016/j.optcom.2004.02.025 Document Type: Article |
Times cited : (23)
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References (20)
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