A 160 × 120 pixel uncooled TEC-less infrared radiation focal plane array on a standard ceramic package

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7298, Issue , 2009, Pages

  Funaki, Hideyuki ^a   Honda, Hiroto ^a   Fujiwara, Ikuo ^a   Yagi, Hitoshi ^a   Ishii, Kouichi ^a   Sasaki, Keita ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

CMOS; Diode; Focal plane array; Infrared; SOI; Uncooled

Indexed keywords

BULK- MICROMACHINING; BULK-MICROMACHINED; CERAMIC PACKAGE; CMOS; CMOS TECHNOLOGY; HIGH UNIFORMITY; INFRARED; INFRARED DETECTION; LOW NOISE; LOW VOLTAGES; MICROMACHINED; P-N JUNCTION; READ-OUT CIRCUIT; SILICON SINGLE CRYSTALS; SOI; SUBSTRATE TEMPERATURE; TEMPERATURE COEFFICIENT; THERMOELECTRIC COOLER; UNCOOLED; UNCOOLED INFRARED;

CERAMIC PRODUCTS; CMOS INTEGRATED CIRCUITS; CONSUMER PRODUCTS; ELECTROMAGNETIC WAVES; FOCAL PLANE ARRAYS; FOCUSING; INFRARED RADIATION; RADIOMETERS; SEMICONDUCTOR JUNCTIONS; SILICON WAFERS; SINGLE CRYSTALS;

PIXELS;

EID: 69949116881     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.819034     Document Type: Conference Paper

References (5)

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