SCOPUS 정보 검색 플랫폼

Volumn 97, Issue 1, 2009, Pages 109-114

Non-linear dissolution of amorphous arsenic sulfide-selenide photoresist films

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC SULFIDE; CO-EVAPORATIONS; IRRADIATION WAVELENGTH; MASK LESS; NON-LINEAR; PHOTORESIST FILM; SELENIDES; SUPERLINEAR;

ARSENIC; DISSOLUTION; PHOTORESISTORS; PHOTORESISTS; SILVER; SOLVENTS; SURFACE TREATMENT;

AMORPHOUS FILMS;

EID: 69549107633 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-009-5337-5 Document Type: Article

Times cited : (3)

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