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Vacuum

Volumn 84, Issue 1, 2009, Pages 162-165

Study of ZnO layers growth by pulsed laser deposition from Zn and ZnO targets

(3) Bruncko, Jaroslav a Vincze, Andrej a Netrvalova, Marie b

a INTERNATIONAL LASER CENTER (Slovakia)

b Nove technologie vyzkumne centrum (Czech Republic)

Author keywords

Pulsed laser deposition; Thin film; Zn target; ZnO; ZnO target

Indexed keywords

AMBIENT OXYGEN; ANALYTICAL METHOD; C-AXIS ORIENTATIONS; COLUMNAR STRUCTURES; DEPOSITION CHAMBERS; HIGH QUALITY; PARALLEL SETS; PULSED ND:YAG LASER; SCANNING ELECTRON MICROSCOPES; SECONDARY ION MASS SPECTROSCOPY; SI (1 1 1); SINTERED CERAMICS; THIN LAYERS; ZN TARGET; ZNO; ZNO FILMS; ZNO LAYERS; ZNO TARGET;

FILM PREPARATION; LASERS; NEODYMIUM LASERS; OXYGEN; PELLETIZING; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING ZINC COMPOUNDS; TARGETS; THIN FILM DEVICES; THIN FILMS; X RAY DIFFRACTION; ZINC; ZINC OXIDE;

DEPOSITION;

EID: 69349083468 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2009.05.005 Document Type: Article

Times cited : (13)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.