Dust formation in Ar/CH4 and Ar/C2H2 plasmas

Plasma Sources Science and Technology

Volumn 18, Issue 3, 2009, Pages

  Winter, J ^a   Berndt, J ^a   Hong, S H ^a   Kovaevic E ^a   Stefanovic I ^a   Stepanovic O ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC HYDROGEN; DECHARGING; DUST FORMATION; GROWTH MECHANISMS; HYDRO-CARBON GAS; INDUCTIVELY-COUPLED; PLASMA PROPERTIES; PULSED PLASMA; RADIO FREQUENCY PLASMA;

HYDROCARBONS; HYDROGEN;

PLASMAS;

EID: 68549101851     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/18/3/034010     Document Type: Article

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